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This diagram shows the ESD protection technique based on Mixed-Mode simulation. This technique involves performing a device experiment test to fulfill target performance parameters such as threshold voltage, drive current, and voltage between source/drain. To obtain ESD parameter, it then prepares the Test Element Group (TEG)*1, which systematically retains variables such as gate length and width for each device to be used in the ESD protection network. The ESD parameter is extracted by measuring the Time Domain Reflection- Transmission Line Pulsing (TDR-TLP)*2 of the completed device. Using the Mixed-Mode simulation that reproduces the ESD parameter, it predicts the current path on the protection circuit network when the ESD input wave is applied, then optimizes device size and resistance value. The information obtained is reflected in layout design as changes in wiring length and device intervals.
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